Multifunction vacuum calibrating device

In order to meet the calibration requirements of vacuum gauge and standard leak in spacecraft thermal test, a multi-function vacuum calibration device was developed. The device can be used to calibrate the vacuum measuring sensors, such as thermocouple vacuum gauge, piezoresistive gauge, capacitance film vacuum gauge, Pan Ninggui, thermo cathode ionization gauge and so on. It can also be used to calibrate the permeable vacuum leak. The device is designed and built with static comparison method, dynamic alignment method and mass spectrometry comparison method. The vacuum calibration range is 1.33 x 105 Pa to 1 x 10-4 Pa. The calibration range of vacuum leak is 5 * 10-5 to 5 * 10-9 Pa. M3/s. The device is intelligent and easy to operate, and is suitable for the batch calibration of vacuum gauge.

With the development of space science and technology in China, vacuum measurement technology has also made great progress. It has been widely used in aerospace, electrical and electronic, petrochemical and other industries. In particular, the rapid development of a series of new fields of national defense, such as manned spacecraft, lunar landing project, Mars exploration, and so on, put forward higher requirements for vacuum measurement, and the corresponding high precision and high reliability calibration requirement of vacuum measurement came into being.

Most of the traditional laboratory vacuum calibration devices are complex in design, costly in development, and time-consuming in calibration, which can not meet the needs of spacecraft development tasks. A multi-function vacuum calibration device is developed in this paper. The device is developed by using the calibration principle of static comparison, dynamic comparison and mass spectrometry comparison. By designing a standard set of capacitance film gauges of different range, the problem of precision deviation in the range of full range is solved. The device has the advantages of simple operation, high degree of automation, batch calibration and so on. The calibration range of the device not only covers the main vacuum calibration requirements in the space field, but also has the advantages of low cost of development and high cost performance.